VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
Native SiO2/Si wafer, grazing X-ray angle
1
After 7 point smoothing
NORM
REGULAR
1
0
0
0
0
0
1
After 7 point smoothing
Native SiO2/Si wafer, grazing X-ray angle
2003
5
10
14
42
15
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
14.4
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
107
-0.0392157
2
counts
d
Transmission
d
pulse counting
0.2
61
4.00E-06
0
0
0
0
512
77
2747.63
6.898
6.948
179.313
6.898
167.563
6.8982
164.563
6.89839
165.125
6.89859
164.813
6.89878
167.688
6.89898
168.375
6.89918
168.125
6.89937
168
6.89957
166.875
6.89976
168.188
6.89996
168.438
6.90016
169.563
6.90035
169.125
6.90055
167.563
6.90075
167.438
6.90094
165.313
6.90114
163.25
6.90133
161.688
6.90153
160.375
6.90173
159.063
6.90192
160.625
6.90212
161.188
6.90231
158.688
6.90251
158.063
6.90271
154.75
6.9029
152.063
6.9031
152
6.90329
151.75
6.90349
153.938
6.90369
156.313
6.90388
157.125
6.90408
156.938
6.90427
152
6.90447
148.625
6.90467
148.063
6.90486
148.625
6.90506
153.875
6.90525
157.313
6.90545
158.75
6.90565
159.688
6.90584
160.938
6.90604
163.25
6.90624
167.438
6.90643
172.75
6.90663
177.313
6.90682
183.438
6.90702
190.313
6.90722
197
6.90741
204.688
6.90761
211
6.9078
216.563
6.908
221.625
6.9082
226.188
6.90839
232.125
6.90859
237.5
6.90878
244.625
6.90898
254.375
6.90918
263.875
6.90937
277.75
6.90957
293.5
6.90976
306.875
6.90996
322.75
6.91016
337.063
6.91035
350.125
6.91055
365.75
6.91075
380.438
6.91094
398.063
6.91114
416.875
6.91133
435.313
6.91153
456.188
6.91173
471.688
6.91192
488.188
6.91212
504
6.91231
515.938
6.91251
530.563
6.91271
541.813
6.9129
555.625
6.9131
569.5
6.91329
578.875
6.91349
592.813
6.91369
601.375
6.91388
611.313
6.91408
625.875
6.91427
634.125
6.91447
642.938
6.91467
650.063
6.91486
652.188
6.91506
652.063
6.91525
652.813
6.91545
646.688
6.91565
643.688
6.91584
647.625
6.91604
646.938
6.91624
650.188
6.91643
648.5
6.91663
636.875
6.91682
627.125
6.91702
618.875
6.91722
612.313
6.91741
610.438
6.91761
605.25
6.9178
594.688
6.918
583.313
6.9182
566.5
6.91839
556.375
6.91859
551.563
6.91878
541.688
6.91898
538.438
6.91918
525.5
6.91937
506.688
6.91957
491.625
6.91976
472.25
6.91996
456.5
6.92016
444.813
6.92035
436.563
6.92055
426.563
6.92075
420.625
6.92094
411.75
6.92114
398.75
6.92133
388.875
6.92153
373.813
6.92173
360.125
6.92192
345.438
6.92212
329.313
6.92231
314.188
6.92251
296.25
6.92271
279.875
6.9229
265.063
6.9231
252.063
6.92329
243.063
6.92349
236.5
6.92369
230.875
6.92388
224.438
6.92408
218.25
6.92427
209.875
6.92447
199.5
6.92467
191.063
6.92486
184.188
6.92506
178.75
6.92525
176.313
6.92545
175.063
6.92565
173.563
6.92584
175.813
6.92604
178.75
6.92624
181.375
6.92643
183.375
6.92663
184.063
6.92682
184.5
6.92702
184.625
6.92722
188
6.92741
190.688
6.92761
193.375
6.9278
197.25
6.928
198.5
6.9282
198.563
6.92839
200.25
6.92859
204.188
6.92878
209.625
6.92898
222.438
6.92918
238.063
6.92937
256.063
6.92957
283.125
6.92976
311.75
6.92996
349.313
6.93016
399.313
6.93035
462.188
6.93055
544.688
6.93075
642.438
6.93094
756.5
6.93114
881.875
6.93133
1020.06
6.93153
1170
6.93173
1313.13
6.93192
1445.06
6.93212
1543.94
6.93231
1594
6.93251
1604.44
6.93271
1567.13
6.9329
1501
6.9331
1429.88
6.93329
1366.56
6.93349
1345.44
6.93369
1375.06
6.93388
1468.38
6.93408
1624.25
6.93427
1821.63
6.93447
2054.5
6.93467
2288.38
6.93486
2496.31
6.93506
2664.25
6.93525
2747.63
6.93545
2730.56
6.93565
2616.63
6.93584
2389.63
6.93604
2096.19
6.93624
1763.38
6.93643
1422.31
6.93663
1117.94
6.93682
854.625
6.93702
651.938
6.93722
499.313
6.93741
388.063
6.93761
309.375
6.9378
250.188
6.938
205.063
6.9382
170.563
6.93839
146.25
6.93859
127.875
6.93878
118.625
6.93898
114.063
6.93918
109.75
6.93937
106.563
6.93957
101.75
6.93976
97.188
6.93996
95.625
6.94016
95.563
6.94035
96.75
6.94055
97.188
6.94075
95.938
6.94094
94.188
6.94114
91.75
6.94133
89.813
6.94153
90.188
6.94173
91
6.94192
94.25
6.94212
97.688
6.94231
98.875
6.94251
100.125
6.94271
97.125
6.9429
94.375
6.9431
93.438
6.94329
91.25
6.94349
92.813
6.94369
94.75
6.94388
95.438
6.94408
97.188
6.94427
97.438
6.94447
96.563
6.94467
95.25
6.94486
94.563
6.94506
93.688
6.94525
94.125
6.94545
94.188
6.94565
92.125
6.94584
90.563
6.94604
86.75
6.94624
83.063
6.94643
80.375
6.94663
77.563
6.94682
77
6.94702
79.375
6.94722
82.813
6.94741
86.5
6.94761
90.438
6.9478
92.438
6.948
end of experiment
